Mass Flow Controllers And Meters For All Clean Gases

FMA3100 Series mass flow sensors represent a breakthrough in mass flow sensor technology. State-of-the-art electronics, a compact mechanical design, and mass production tooling concepts are combined into one high- performance, cost effective product. The gas flow sensor is suitable for many OEM applications. A 0 to 5 Vdc linear output is standard.

Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.

The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.

GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ±1.5% FS*
Repeatability: ±0.5% FS
Response Time: 2 seconds (typical) to within ±2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ±0.2% per °C
Pressure Coefficient: ±0.02% per psi
Leak Integrity: 1×10^-4 SCCS, He maximum to outside environments
Input Power:
    FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
    FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8′ compression fittings, flow ranges up to 1 L/min; ¼’ compression fitting for up to 5 L/min; 3/8′ compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter

SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
    FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
    FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
    FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
    FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55′)
    FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0′)
    FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80′)

* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ±0.1V) typical
4. Linearity: Add ±0.5% for ranges up to 500 mL/min, ±1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used